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Wednesday, November 19, 2008

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Welcome to the latest issue of Future Fab International! We are pleased to introduce the newest member of the Future Fab Editorial Panel, helping to lead the Manufacturing Systems & Software section: Tom Sonderman, vice president, Manufacturing Systems Technology, AMD. And helping to spearhead our Future Visions & Current Concerns section is Luigi Columbo, Fellow at Texas Instruments. Beginning in this issue, Mr. Sonderman and Dr. Columbo shares their thoughts.

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In this issue:

Future Visions & Current Concerns

How the foundry model will adapt to trend-driven changes in the market.

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New Technologies & Device Structures

Where nanotechnology has penetrated the semiconductor industry and where the potential growth opportunities lie.

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Design Implementation & Process Integration

A paper that describes why the selection of the right DFM solution will depend on the human factors of the players. Why the semiconductor and surrounding industries should consider looking into possible hybrid engineering in the DFM area.

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Manufacturing, Systems & Software

A discussion of challenges and opportunities associated with manufacturing automation development for DFM. Various factors that define the optimal quantity of wafers in a lot of size smaller than 25 wafers, and that shows the potential for decreases in cycle time associated with various equipment configurations and wafer lot sizes.

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Front End of Line

A discussion of one of many critical challenges in Ge-based channels—threshold voltage control—and an overview of module-level issues in non-planar devices. A technique that involves the field-by-field deposition and exposure of a low viscosity resist deposited by jetting technology onto the substrate.

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Back End of Line

An investigation of the critical issue of mechanical stability in certain airgap interconnect structures during thermal processing and under chip packaging interaction (CPI) using 3D multilevel finite element analysis (FEA) models. A paper that investigates the impact of CO2 plasma on porous organosilicate low-k dielectrics to explore its potential to replace O2 plasma for ashing processes.

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Metrology, Inspection & Failure Analysis

A work that challenges the premise that metrology is a nonvalue-added necessary evil, positing that it is a dangerous assertion that should be viewed as obsolete thinking. A report on the measurement of the nitrogen content in a set of thin thermal oxides, comparing different noncontact electrical and XPS techniques.

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Wafer Fab & Packaging Integration

A study that proposes two approaches to improve the electroplating process for filling vias of 5 µm x 25 µm, both resulting in void-free CU electroplating of 3D vias with reduction in electrodeposition time. An article that focuses on principle methods of 3D chip stacking; particularly, cost-effective and reliable thinning and singulation processes for semiconductor facilities.

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Assembly, Test & Packaging Technologies

Why the main challenges in electronic packaging for the years ahead are maintaining a workable industrial infrastructure for complex system solution packaging and developing cost-attractive manufacturing platforms for the strong proliferation of package solutions.

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BLAST FROM THE PAST

A Novel Post-Pump PFC Abatement Technology Based on Atmospheric Surface-Wave Microwave Plasmas
An atmospheric surface-wave microwave plasma technology is presented as an alternative to classical combustion systems for post-pump abatement of etch process effluents containing perfluorinated compounds (PFCs).
Future Fab Intl.Volume 14, 2/11/2003

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